Mission & Overview

Mission

To provide Quality Engineering/Technical Services & Best Known Solutions to customers in achieving better yield and overall cost reduction.

Technical Support

provide system sales service, on-site manpower/ technical warranty support, relocation, retrofit & modification, refurbishment and upgrade of semiconductor tools, new system installation (Tier 0, I & II) & warranty (PM & CM) and parts repair/refurbishment to semiconductor customers.

Alternate Parts/CIP/Repair/Upgrading

provide services such as repair & refurbish parts, advance Engineering solution.

SEMICONDUCTOR - Products & Services

Systems Sales, Start-up, Installation & Warranty Support:

APPLIED MATERIALS System Model:
  • P5000 & C5200 ETCH (Metal, Poly, Oxide)
    DPS, DPS+ Super-E, eMxP+, etc
  • P5000, C5200 CVD & C5200 RTP
  • E5500 PVD ENDURA
  • MIRA MESA CMP
Other System Model:
  • PSTH FX-200 (Ashing)
  • NIKON NSR1505G6~i14E2~ Scanner
  • NOVELLUS C1/C2 Speed/Sequal

Services available

  • System installation and setup, Tier 0 till Tier II
  • Warranty support which include PM & Corrective Maintenance
  • Relocation, retrofit & modification, refurbishment and upgrading
  • Contract Service Agreement (Wet clean, PM, CM etc)
  • Current Manpower Support / Contractual PM/CM
    AMAT ETCH - GLOBALFOUNDRIES F2/3/5/3E
    GST Scrubber – AMST/IME
    PSTH Asher– SilTerra (Malaysia)
    Nikon – STM, Qualcomm

AMAT ETCH Refurbishment/Retrofit Services

  • AMAT DPS METAL System Refurbishment
  • AMAT eMxP+ System Refurbishment, Chamber Retrofit
  • AMAT Super-E Refurbishment, Chamber Retrofit
  • AMAT Centura ASP Chamber Retrofit
  • AMAT DPS Poly Deep Trench Refurbishment, Chamber Retrofit
  • P5000 Upgrade Chamber

CVD Services

  • HDP ETO convert ENI Rack/Generators
  • Microwave convert RPS
  • DxZ System Refurbishment

WXZ Services

  • Standard to Sprint Conversion

ENDURA Services

  • HOT AL Chamber Retrofit
  • IMP Ti Retrofit, CVD TiN Retrofit
  • HOT AL System with IMP Ta Refurbishment
  • PCII Chamber Relocation

Nikon Services

  • Field Services: NSR Troubleshoot & Unit Adjustment support
  • Relocation: All Nikon tools
  • Overhaul: Stage/Lens/WL/RL/LC, etc
  • PM: Preventive Maintenance
  • Retrofit: Lens improvements
  • Modifications: Conversions
  • Parts: NSR Parts Supply
  • Resale: NSR Installation and Relocation
Our Specialist Mr. Choi Chang Ho has 16 years of field experience on Nikon & ASML specializing
  • Nikon Stepper : I12D, I14E, SF130, SF140
  • Nikon Scanner : S204B, S205C, S206D, S306C
  • AMSL Scanner : PAS 400D, 750E, 850D, TWIN 860L & M
  • Nikon Spare Parts Storage in Korea
Authorized Agent for SBB CO., LTD (http://www.sbb.co.kr/)
  • Ceramic Bearing for VHP/VHP+ / HP/HP+ Robot / etc
  • Sales and installation support for Applied Material systems - ETCH, CVD andPVD.
  • Value added Service: HP/VHP robot repair and Installation Service
ENDPOINT DETECTION - Monochromator Upgrade to VEP-2000
Item
Mono
VEP-2000
Wavelength Numbers
Only one Wavelength reading and writing
Full Wavelength reading and writing (200nm~800nm)
S/W Spec.
DOS O/S
Lack of HDD Space
Windows O/S
Can be control HDD Space
EPD Algorithm
Only One (Window Box)
Several Advanced EPD Algorithm
Function
Only EPD Function
Several Advanced Function
  • Seasoning Optimization,…
  • Can be Control & Monitoring at Office
EPD Function
  • No EPD Analysis Function
  • Difficult to Find Out wavelength
  • W to W EPD Trend Analysis
  • Lot to Lot EPD Trend Analysis
  • Long term EPD Time Trend Analysis
  • Easy to find out wavelength
Operation cost
Difficult to EPD Failure
Lower Maintenance Costs
VEP-2000 S/W Functions
Various analysis
3D view analysis
Trend analysis
Seasoning & Clean optimization
Leak & Abnormal Gas detection
N2_688mm
Black : Normal wafer Blue : Leak Happen
▶ Time Trend Display – Difference Value
Sophisticated S/W
Sensor &Tool data Sync.
MVA
Verify
Endpoint
Detector
What is “TCM”? Touch monitor Controller Module

Don’t put up with such inconvenience or troubles, “TCM” appears as an innovative solution.


A conventional
CRT-Light pen
TCM
LCD control by just a touch pen or “TOUCH” function
Exclusive for AMAT Tool Centura/ENDURA/P5000

SEMICONDUCTOR/SOLAR/LCD - Products & Services

Authorized Agent

GLOBAL STANDARD TECHNOLOGY CO., LTD

(http://www.gst-international.com/)

Scrubbers Sales, Service and Repair

Burn Wet, Thermal Wet, Plasma and AQUA-EP

Burn Wet1
Thermal Wet
Plasma
AQUA-EP


Authorized Agent

LOT Vacuum Co.,Ltd

(https://www.lotvacuum.com)

Scrubbers Sales, Service and Repair

Burn Wet, Thermal Wet, Plasma and AQUA-EP




Authorized Agent

Advanced Wave Co., Ltd.

(https://www.advancedwave.co.kr)

Scrubbers Sales, Service and Repair

* Power Vaccine: Concept of the perfect sag protection at any sag duration time under 1 sec and 0~90% voltage fluctuation.

“VSP” : Product based on ‘Power Vaccine’ concept




SOLAR - Products & Services

Authorized Agent

Authorized Distributor: REC Solar

(https://www.recgroup.com/en)

Scrubbers Sales, Service and Repair

* REC’s combination of product quality, company reliability, and commitment to sustainability makes us the ideal brand for your solar investment, whether residential, commercial, or utility scale.




Authorized Agent

Authorized Sales Agent:Huawei Invertors

(http://solar.huawei.com/eu/)

Scrubbers Sales, Service and Repair

* Huawei innovates and optimizes throughout the entire lifecycle of PV energy generation. By integrating cutting-edge digital, internet and PV technology, FusionSolar Smart PV Solution is efficient, easy to install, safe and reliable, helping customer to achieve better ROI with higher yields and lower maintenance cost.




Authorized Agent

Authorized Sales Agent:Tigo Optimizer

(https://www.tigoenergy.com/)

Scrubbers Sales, Service and Repair

* Module-level intelligence expands asset management capabilities and optimizes performance

Deploy what is needed, upgrade any time with modularity

Eliminate money spent on unneeded “one-size-fits-all” features


TS4-D
Diodes
Better performance and reliability with hotspot mitigation
TS4-M
Monitoring
Fleet management and warranty tracking
TS4-F
Fire Safety
Module-level Rapid Shutdown
TS4-S
Safety
Rapid Shutdown and monitoring
TS4-O
Optimization
Increased yields for customers with shade and mismatch
TS4-L
LongStrings
Reduce BoS costs for commercial sites


Graphite Boat (Solar)
Graphite Process
  • Ultrasonically clean for 10 minutes
  • DI water at a resistivity of 2 MΩ-cm or greater
  • Oil-free chamber
  • Temperature of at least 200°C
  • At least 2 hours
  • Never use bare hands
  • Cleaned with semicon grade isopropyl alcohol
  • All tools cleaned
  • Bagged individually in HDPE and bubble wrap
  • Excess air is removed and heat seal bags
  • Shrink wrapped over corrugated plastic pressboard
  • Inner bagging in clean room
  • Cleanroom stock sticker
  • Labels in inner bag and pressboard
  • Operations in Clean Room
    Packaging and Labeling
    Quartz Tube (Solar)
    Process
    Custom 6”/8”/12”
    Description
    OUTER TUBE
    Material
    Fuse Quartz (GE-214, 224)
    Advantages
    Qualified Worldwide
    Fast Delivery
    Description
    INNER TUBE - 6”/8”/12”
    Material
    Fuse Quartz (GE-214 , 224)
    Advantages
    Qualified Worldwide
    Fast Delivery
    Description
    QUARTZ BOAT - 6”/8”/12”
    Material
    Fuse Quartz (GE-214, 224)
    Advantages
    Qualified Worldwide
    Fast Delivery
    Description
    PIN PEDESTAL - 6”/8”/12”
    Material
    Fuse Quartz (GE-214, 224)
    Advantages
    Qualified Worldwide
    Fast Delivery

    SEUL/Partners Quality Control

    Material
    IQC
    IPQC
    FQC
    Functional Test
    Shipping
    SQE
    • Supplier management
    • IQC support
    PE/iE
    • Preventive aciton
    FA analysis
    • Trial run
    • Failure analysis
    Customer
    service
    • Custormer support
    • After sale service
    Safety
    Standard
    • UL
    • CE
    • CCC
    Quality system
    • ISO 9000
    SPC
    CPK
    MSA
    FMEA
    8D
    5S
    DMAIC

    Our Customers

    Singapore

    • APPLIED MATERIALS
    • GLOBALFOUNDRIES Fab 2, Fab 3/5, Fab 3E, Fab 7G & 7(300mm)
    • HP (Hewlett Packard)
    • IME (Institute of Microelectronics)
    • NUS (National University of Singapore)
    • Qualcomm (RF360/EPCOS/TDK)
    • SSMC
    • UMC (300mm)
    • STMicroelectronics
    • AUO (AFPD)
    • AMF (Advanced Micro Foundry)
    • StatsChippac (JCET)
    • Lumileds
    • VIS Singapore (Vanguard International Semiconductor)

    Malaysia

    • HANWHA Q Cells
    • INFINEON
    • MIMOS
    • SILTERRA
    • X-FAB Sarawak